| 摘要 |
PROBLEM TO BE SOLVED: To generate inspection reference data of high precision at a high speed, by installing a preliminary expansion means which extracts information of an element figure together with two bit pattern expansion means different in quantizing dimension, and a figure data distributing means which distributes the outputs of the preliminary expansion means in two bit patterns. SOLUTION: A part corresponding to a pattern is scanned in the course of observation, to obtain a pattern to be inspected, and the pattern is fetched in data memories 31-33 in a bit pattern generating circuit 13 by a means like DMA transfer. Quantization dimension of one picture element at the time of expansion by bit pattern expansion circuit 35, 38 is given in advance to a preliminary expansion circuit 34 precedent to the first and the second bit pattern expansion circuits 35, 38 from a computer 10. The preliminary expansion circuit 34 reads a bank of the data memory corresponding to a stripe in the course of inspection, out of the data memories 31-33, extracts figure data to be processed, and deciphers them. Then, an element figure is distributed most suitably in the bit patterns 35, 38 by a figure data distributed circuit 41. |
