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发明名称
PROBER
摘要
申请公布号
JPH10284550(A)
申请公布日期
1998.10.23
申请号
JP19970106614
申请日期
1997.04.08
申请人
TOKYO ELECTRON LTD
发明人
SUGAWARA MORIO
分类号
G01R31/28;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/28
代理机构
代理人
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