Methode zur Herstellung von Faser-Tastspitzen unter Benutzung von strukturiertem reaktiven Ionenätzen

摘要

Method of making a fibre probe device comprises: (a) providing an optical fibre segment having a waveguiding core (18) and outer cladding (10); (b) etching a lower portion to form a thinned lower portion (12); (c) forming a cleaved endface on the thinned portion; (d) coating the endface with a protective photoresist; (e) propagating radiation through the core to the endface; (f) developing the resist so that it coats the core region only; (g) anisotropically dry etching the endface (16), the resist acting as a mask (42) for the core; and (h) isotropically etching the exposed core (19) to form a tip.