发明名称 DISCHARGE SYSTEM FOR A REACTOR
摘要 Discharge system for a reactor, such as a furnace. The discharge system comprises a collection duct, to which a number of discharge lines are connected, each discharge line in turn being coupled to an installation, such as a furnace. In order to keep the reduced pressure at the location of a furnace of this nature as constant as possible, it is proposed to provide a valve at the location of the reactor, which valve adjusts an opening between the discharge line and atmosphere in a controllable manner. In this way, a controlled reduced pressure can be maintained at the location of the valve, i.e. at the outlet from the reactor.
申请公布号 WO9846345(A1) 申请公布日期 1998.10.22
申请号 WO1998NL00204 申请日期 1998.04.09
申请人 ASM INTERNATIONAL N.V.;STOUTJESDIJK, JEROEN, JAN 发明人 STOUTJESDIJK, JEROEN, JAN
分类号 F16K17/18;B01J4/00;F27D17/00;(IPC1-7):B01J4/00;C23C16/44;F27D7/00 主分类号 F16K17/18
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