发明名称 |
DISCHARGE SYSTEM FOR A REACTOR |
摘要 |
Discharge system for a reactor, such as a furnace. The discharge system comprises a collection duct, to which a number of discharge lines are connected, each discharge line in turn being coupled to an installation, such as a furnace. In order to keep the reduced pressure at the location of a furnace of this nature as constant as possible, it is proposed to provide a valve at the location of the reactor, which valve adjusts an opening between the discharge line and atmosphere in a controllable manner. In this way, a controlled reduced pressure can be maintained at the location of the valve, i.e. at the outlet from the reactor.
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申请公布号 |
WO9846345(A1) |
申请公布日期 |
1998.10.22 |
申请号 |
WO1998NL00204 |
申请日期 |
1998.04.09 |
申请人 |
ASM INTERNATIONAL N.V.;STOUTJESDIJK, JEROEN, JAN |
发明人 |
STOUTJESDIJK, JEROEN, JAN |
分类号 |
F16K17/18;B01J4/00;F27D17/00;(IPC1-7):B01J4/00;C23C16/44;F27D7/00 |
主分类号 |
F16K17/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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