发明名称 |
System for transferring wafers from cassettes to furnaces and method |
摘要 |
System for treating wafers. It is proposed to place a number of furnaces in one area and wafer racks filled with wafers are introduced into each of these furnaces. The wafer racks are located in trolleys which are filled from cassettes in a central loading/removal device. The central loading/removal device serves for all furnaces. |
申请公布号 |
AU6526298(A) |
申请公布日期 |
1998.10.20 |
申请号 |
AU19980065262 |
申请日期 |
1998.03.25 |
申请人 |
ASM INTERNATIONAL N.V. |
发明人 |
GERT-JAN SNIJDERS |
分类号 |
B65G49/07;H01L21/205;H01L21/22;H01L21/673;H01L21/677 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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