摘要 |
PROBLEM TO BE SOLVED: To provide a producing method by which many formed bodies or large-size products can be calcined by heating by irradiation of microwaves without causing an irregular heating state or cracks. SOLUTION: A piezoelectric ceramic powder such as PbTiZrO3 having <=3 μm average particle size is compacted, then irradiated with microwaves of >=20 GHz by using an oscillator such as a gyrotron to heat and sinter at 900 to 1300 deg.C. By this method, the compacted body can be uniformly heated, so that many formed products or large-size products can be obtd. without defects such as cracks. The obtd. piezoelectric ceramic material has excellent strength and piezoelectric characteristics. |