METHOD FOR INSPECTING FOREIGN ARTICLE BY HETERODYNE POLARIZATION AND APPARATUS CARRYING OUT THE METHOD,申请号JP19980015772-传众专利搜索

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发明名称	METHOD FOR INSPECTING FOREIGN ARTICLE BY HETERODYNE POLARIZATION AND APPARATUS CARRYING OUT THE METHOD
摘要
申请公布号	JPH10274621(A)	申请公布日期	1998.10.13
申请号	JP19980015772	申请日期	1998.01.28
申请人	ADVANTEST CORP	发明人	YOSHIDA HARUO
分类号	G01N21/88;G01N21/21;G01N21/93;G01N21/94;G01N21/956;H01L21/66;(IPC1-7):G01N21/21	主分类号	G01N21/88
代理机构		代理人
主权项
地址

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