| 摘要 |
PROBLEM TO BE SOLVED: To measure the concentration of specific gas contained in a gas to be measured accurately to ppm unit without effected by concentration change in miscellaneous gas component even if such miscellaneous gas as steam is present in the gas. SOLUTION: A gas to be inspected is introduced into the first oxygen pumping cell 13 and the first oxygen concentration measurement cell 14, and the oxygen in the gas is taken out with the first oxygen pumping cell 13 based on the output of the first oxygen concentration measurement cell 14 so that the oxygen concentration in the introduced gas is to be a specified concentration. Then the to-be-inspected gas which is at specified oxygen concentration is introduced into the second oxygen pumping cell 15 and the second oxygen concentration measurement cell 16, and based on the output of the second oxygen concentration measurement cell 16, such current as the steam contained in the gas is resolved is supplied to the second oxygen pumping cell 15, and based on the current, a specific gas concentration in the gas is obtained. |
