| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the static characteristics and dynamic characteristics of a stage device, by decreasing the number of electric wirings and air pressure tubes drawn by the main body of the movable stage of the moving stage device. SOLUTION: When a movable stage structure 2 comes to a wafer replacing position on a base structure constituting a moving stage device 1, a power transmitting terminal 9a provided on the side of the base structure and a power receiving terminal 9a provided on the side of the movable stage structure are brought into contact. The current supplied from the power transmitting terminal 9b charges the battery mounted on the movable stage structure 2. Thereafter, when the stage structure is separated from the wafer replacing position, the electric power of the battery is used, and the wafer mounted on the stage structure is electrically suckled and maintained. The control for the starting of the sucking, the release of the sucking and the like at the time of wafer replacing work is performed by a radio communication method or a wire coupler method in this constitution.</p> |
