发明名称 MANUFACTURE OF REFLECTOR AND MANUFACTURE DEVICE THEREFOR
摘要 PROBLEM TO BE SOLVED: To manufacture a reflector capable of being made a large in diameter. SOLUTION: A metallic film 13 is formed on an insulation substrate 12 (1st process) and a resin film 14 is formed on the metallic film 14 (2nd process), and a surface shape of the insulation substrate on which the resin film is formed is measured (3rd process). Furthermore, based on a measured value by the 3rd process, a focal point of a laser beam is controlled to allow a laser beam to be scanned on the resin film along a contour of a conductive pattern P (4th process). An undesired part of the resin film is exfoliated to expose a part of the metallic film not being the conductor pattern (5th process), the metallic film is etched by using the resin film left on the metallic film as a mask M to from the conductor pattern (6th process). The resin film left on the conductor pattern formed in the 6th process is removed (7th process).
申请公布号 JPH10270933(A) 申请公布日期 1998.10.09
申请号 JP19970073438 申请日期 1997.03.26
申请人 TOSHIBA CORP 发明人 KAWADA YOSHITAKA;KURIYAMA HIROSHI
分类号 H01Q15/22;H01P11/00;H05K3/06;(IPC1-7):H01Q15/22 主分类号 H01Q15/22
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