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发明名称
WORK BASE WITH VAPOR PHASE-SYNTHESIZED FILM AND ITS MANUFACTURE
摘要
申请公布号
JPH10263966(A)
申请公布日期
1998.10.06
申请号
JP19970069767
申请日期
1997.03.24
申请人
TOYODA MACH WORKS LTD;TOYOTA CENTRAL RES & DEV LAB INC
发明人
IMAI TOMOYASU;MUKAI RYOHEI;SOMA SHINJI;SUZUKI HIROAKI;UCHIDA KIYOSHI;HIGUCHI KAZUO;ITO AKIO
分类号
B23Q3/02;C23C16/00;C23C16/27;(IPC1-7):B23Q3/02
主分类号
B23Q3/02
代理机构
代理人
主权项
地址
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