| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a processing method in which the distribution of the content of a target element in a sample is found quickly as two-dimensional information by a method wherein a two-dimensional X-ray-intensity distribution obtained by a mapping technique in an EPMA is changed into a quantitative value by correcting a locally different matrix. SOLUTION: From a sample composed of a plurality of oxides, a two-dimensional X-ray-intensity distribution is obtained by a mapping technique in an EPMA. Then, when the two-dimensional X-ray-intensity distribution is changed into a quantitative value, a locally different matrix is corrected. When it is corrected, a matrix correction factor in a two-dimensional oxide system is found in advance regarding the oxide of all existing elements. Then, when the content of a specific oxide in a sample to be analyzed is found, the matrix correction factor in the two-dimensional oxide system of a coexistent oxide with reference to the specific oxide is weighted with the amount of the coexistent oxide so as to obtain a correction factor with reference to the specific oxide. Thereby, by performing a quantitative computing operation, the distribution of the content of a target element in the sample can be found quickly as two-dimensional information.</p> |
