发明名称 |
Method of characterizing dynamics of a workpiece handling system |
摘要 |
A method of characterizing dynamics of a workpiece handling system includes providing a workpiece or substrate (14), supporting the substrate (14) with a workpiece handler (13), providing a motion for the workpiece handler (13), transforming the motion into a signal, converting the electrical signal into a measurement of distance, and using the measurement of distance to determine a vibration in the motion.
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申请公布号 |
US5814733(A) |
申请公布日期 |
1998.09.29 |
申请号 |
US19960713271 |
申请日期 |
1996.09.12 |
申请人 |
MOTOROLA, INC. |
发明人 |
KHOURY, THEODORE A.;KATRENICK, GREG A.;O'CONNELL, RICHARD |
分类号 |
G01R31/28;G10H1/08;(IPC1-7):G01H11/08;G01R31/01;G01R31/02;G01R31/26 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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