MANUFACTURE OF VACUUM VALVE

摘要

PROBLEM TO BE SOLVED: To attain high reliability, excellent cost performance, and environment measures by performing metallizing and airtight faying at the same time. SOLUTION: Manufacture of this vacuum valve has a first process to finish ceramic member surface to the surface roughness of 0.1 to 15μm, a second process to arrange a brazing material composing foil or line state Ag or/and Cu and Ti so as to be 0.05 to 4wt.% of Ti between an opposite ceramic member and a metal member, and a third process to seal and deposit the ceramic member and the metal member at a melting temperature or more determined by Ti quantity in non-oxide atmosphere.