| 摘要 |
<p>PROBLEM TO BE SOLVED: To allow a sufficiently accurate machining process for a micro projection formed due to foreign matter and caused to adhere to the surface of a color filter as a primary factor for a pixel defect. SOLUTION: Before a machining process, a polishing head 4 is kept in contact with a normal region (n) in the vicinity of a micro projection, and the reference height of the head 4 is saved. Thereafter, the machining process is started and ended when the progress of the process reaches the reference height. Also, a measurement device capable of taking measurements by the unit of a 0.01μm is used to measure the height of a machining means, and pressing force at the machining process is set within the range where the deformation amount of the micro projection does not exceed 0.15μm at least during a final machining stage.</p> |
