Wire saw cutting method synchronizing workpiece feed speed with wire speed

摘要

A wire saw slicing method capable of slicing a workpiece into wafers having a flat shape free from undulations (waviness) includes feeding the workpiece or a wire along a linear feed path to force them together, and reciprocating the wire in the axial direction. A first cyclic pattern of the feed speed of the workpiece or the wire and a second cyclic pattern of the reciprocating speed of the wire are set in such a relation that the first and second cyclic patterns are synchronized at least during a time period of one of the modes of the respective cyclic patterns.