发明名称 Offset-free resistor geometry for use in piezo-resistive pressure sensor
摘要 An improved resistor and connection region structure in which the geometries of the connection regions for a pair of radial resistors correspond to the connection region geometries for a pair of tangential resistors, thus inherently eliminating the need for varying connection regions to compensate for offset. In particular, the radial resistors are formed by placing two legs in parallel with each other and connecting those legs in series on opposite sides of the membrane, with the connection region on the interior of the membrane. The tangential resistors, on the other hand, are formed on the opposite sides by placing two legs in series with each other and connecting those legs in series, with an interior connection region connecting them.
申请公布号 US5812047(A) 申请公布日期 1998.09.22
申请号 US19970800437 申请日期 1997.02.18
申请人 EXAR CORPORATION 发明人 VAN KAMPEN, ROBERTUS P.
分类号 G01L9/00;(IPC1-7):G01L1/22 主分类号 G01L9/00
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