发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To improve the connection reliability and reduce the manufacturing time by laying a sheet-like setting resin on a substrate, bonding a semiconductor device to connection terminals with the resin sandwiched, and at the same time sealing the device on the substrate with the resin. SOLUTION: A sheet-like unhardened underfill thermosetting resin 9 is prepared in a solid or half-solid state according to the shapes of a semiconductor chip 1 and interconnecting terminals 2 and thickness of these terminals 2 and can be easily mounted on a substrate (interpose) 3. This resin 9 is heat-cured into a perfect and tight solid state underfill resin 8 which adheres and seals the chip 1 to interposer 3. Thus it is possible to perfectly prevent unfilled parts or inner voids from occurring.
申请公布号 JPH10242208(A) 申请公布日期 1998.09.11
申请号 JP19970040252 申请日期 1997.02.25
申请人 OKI ELECTRIC IND CO LTD 发明人 EGAWA YOSHIMI
分类号 H01L21/60;H01L21/56;H01L23/12;H01L23/498 主分类号 H01L21/60
代理机构 代理人
主权项
地址