摘要 |
PROBLEM TO BE SOLVED: To avoid dielectric breakdown of an insulation film between an Al field plate electrode and base region with keeping specified breakdown voltage of a Zener diode by forming this plane electrode distant from a base region on a collector region. SOLUTION: An Al field plate electrode 4 is disposed at an optimum position on a collector region 1 so as to be at a distance d=6-14μm from a base region 2 according to the relation of the distance d and drift of the breakdown voltage of a diode formed between a collector region 1 and base region 2. This holds a given amt. of electrons induced in a lower region of the plate electrode 4 for keeping specified breakdown voltage, thereby avoiding the dielectric breakdown of an insulation film 5.
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