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发明名称
SPUTTERING DEVICE FOR FORMING BARRIER FILM FOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH10237639(A)
申请公布日期
1998.09.08
申请号
JP19970055550
申请日期
1997.02.24
申请人
ANELVA CORP
发明人
KOBAYASHI MASAHIKO
分类号
C23C14/06;C23C14/34;H01L21/203;H01L21/285;(IPC1-7):C23C14/34
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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