| 摘要 |
PROBLEM TO BE SOLVED: To transfer a substrate with a simple structure and stable accuracy, restrain generation of dust, and transfer the substrate suitably even in a vacuum chamber which requires cleanness. SOLUTION: This articulated arm type transfer device is provided with the base end parts of the third and fourth arms 11, 12 rotatably-connected to the front ends of the first and second arms 9, 10 whose base ends are rotatably-supported against the first and second shafts 6, 7 so as to rotatably- connect the front end parts of the third and fourth arms 11, 12 to each other, and a substrate retaining part 13 integrally-formed at the front end of the third arm 11. The first and second arms 9, 10 are controlled so as to rotate independently respectively around shafts 6, 7. |
