Dreieckige Kammer für Aufdampfungs-Anlage,申请号DE19946011811-传众专利搜索

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发明名称	Dreieckige Kammer für Aufdampfungs-Anlage
摘要
申请公布号	DE69411811(D1)	申请公布日期	1998.08.27
申请号	DE19946011811	申请日期	1994.04.05
申请人	CVD INC., WOBURN, MASS., US	发明人	GOELA, JITENDRA S., ANDOVER, MASSACHUSTTS 01810, US;BURNS, LEE E., READING, MASSACHUSETTS 01867, US;TEVEROVSKY, ALEXANDER, CONCORD, MASSACHUSETTS 01742, US;MACDONALD, JAMES C., STONEHAM, MASSACHUSETTS 02180, US
分类号	C23C16/32;C23C16/01;C23C16/44;C23C16/455;C30B28/14;C30B29/36;(IPC1-7):C23C16/32	主分类号	C23C16/32
代理机构		代理人
主权项
地址

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