FLOW SENSOR COMPONENT

摘要

A flow sensor component comprising a membrane (10), made of monocrystalline silicon, whereby grooves (14) filled with a heat-insulating material are arranged in the membrane (10), cutting through the membrane (10) from a first main surface therein to a second main surface therein. A plurality of areas (16, 18, 20) in the membrane provided with heating elements (28) and/or temperature-measurement elements (22, 24, 26) is defined by the grooves (14), which insulate said elements from each other against heat.