METHOD AND APPARATUS FOR GENERATING PLASMA,申请号KR19930011564-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR GENERATING PLASMA
摘要
申请公布号	KR0139402(B1)	申请公布日期	1998.08.17
申请号	KR19930011564	申请日期	1993.06.24
申请人	MATSUSITA ELECTRIC CO.	发明人	NAKAYAMA ICHIRO;NOMURA, NOBORU;TAMAOKI, TOKUHIKO;OOKUNI, MITSUHIRO;KUBOTA, MASABUMI
分类号	H01L21/302;H01J37/32;H01L21/3065;H05H1/46;(IPC1-7):H05H1/30	主分类号	H01L21/302
代理机构		代理人
主权项
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