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发明名称
METHOD AND APPARATUS FOR GENERATING CIRCULAR ELECTRONIC RESONANCE PLASMA
摘要
申请公布号
KR0141905(B1)
申请公布日期
1998.08.17
申请号
KR19930024624
申请日期
1993.11.18
申请人
LEE, KI-BANG;NAM, KI-SUK
发明人
LEE, KI-BONG;NAM, KI-SUK
分类号
H05H1/00;(IPC1-7):H05H1/00
主分类号
H05H1/00
代理机构
代理人
主权项
地址
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