FABRICATION OF CARBON MICROSTRUCTURES

摘要

A technique for forming high-carbon structural articles, such as glassy carbon articles, is provided that involves molding fluid precursors of the article into a predetermined shape, followed by carbonization of the articles. An elastomeric mold can be used to mold the precursors, and the resultant, free-standing articles have features on the micron or nanometer scale. A variety of useful articles including sensors, actuators, microelectromechanical systems, transmission electron microscopy grids, and the like, are provided.