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发明名称
ION IMPLANT SYSTEM
摘要
申请公布号
KR0121286(Y1)
申请公布日期
1998.08.01
申请号
KR19950007036U
申请日期
1995.04.10
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
YANG, SEUNG-YUL;CHOE, DUK-SOO;SEO, KYUNG-HWAN
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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