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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD, AND SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH10200109(A)
申请公布日期
1998.07.31
申请号
JP19970011937
申请日期
1997.01.07
申请人
TOSHIBA CORP
发明人
CHIKAMATSU NAOHITO
分类号
H01L21/28;H01L21/336;H01L21/8234;H01L21/8238;H01L27/088;H01L27/092;H01L29/10;H01L29/78;(IPC1-7):H01L29/78;H01L21/823
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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