| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the occurrence of dislocation by equipping an exposer with a quantity-of-inclination computing means which computes the quantity of inclination of a board placed on an exposure stage, and a quantity-of-expansion-and-contraction compensating means which compensates the quantity-of-expansion-and-contraction computed by the computed quantity-of-inclination. SOLUTION: The coordinates of position detecting marks 16 made at optional ten shots out of sixty four shots allotted to a board 6 are measured. Subsequently, the quantity of inclination of the shot where the coordinate of the position detecting mark 16 is measured is measured. The measurement point a1 and the measurement point a2 distances G1 separated from the center O of the shot are set at the corners of the shot, and the height of the measurement point a1 and the height of the measurement point a2 being set are measured. Next, light is applied toward the measurement points a1 and a2, and an exposure stage 5 is moved up and down so that the reflected light may focus at an autofocus sensor 1, and the heights of the measurement points a1 and a2 are measured. The quantity of inclination of one shot is computed from the measured heights of the measurement points a1 and a2. Successively, the coordinate of the position detecting mark is compensated by the quantity of inclination of the shot.</p> |
