SILICON CARBIDE-COATING MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a silicon carbide-coating material capable of easily obtaining a super smooth surface and high precisely working a fine recessed groove similar to a grating groove in a diffraction grating. SOLUTION: The silicon carbide-coating material 1a is formed by coating the surface of a base body 2 with a silicon carbide film 3 by chemical vapor deposition. The crystal plane of the silicon carbide film 3 is strongly oriented on (222) plane in the Miller index designation and the X-ray diffraction strength of the (222) plane is >=10 times that of any plane except the (222) plane. The crystal size of the silicon carbide film 3 is <=20μm.