| 摘要 |
A module system for use in clean rooms comprises one or more of the units connection cover (2) for connection to a supply air pipe, air filter (4, 6) preferably HEPA filter, supply air device (16, 18, 20) and light module (12, 14). These units are constructed as modules having standard dimensions to enable them to be combined in optional combinations to provide arrangements with desired functions. |
