Microscope system for determining emission distribution of light emitting samples e.g. in semiconductor ICs

摘要

The system determines the emission distribution of at least spot type light emitting samples esp. for fault analysis in ICs (hot spots). It consists of an imaging radiation beam course from the sample in the direction of at least a unidimensional receiver distribution. At least one element is provided, for spectral splitting of at least the spot type emitting the light. The element for spectral splitting is a dispersion element i.e. a transmission grating. The grating can be a reflection grating integrated in the imaging across optical deflecting elements.