| 摘要 |
PROBLEM TO BE SOLVED: To supply a processing liquid to each processor from a single processing liquid supply mechanism even when a plurality of processors are provided by controlling a valve unit such that the time for delivering the processing liquid is not overlapped among the processors. SOLUTION: When a valve 160 is opened by a control signal from a controller 138, a developer in a tank 170 is passed through a flow rate regulator 168, a filter 166 and a heat-exchanger 164 associated with a transfer tube 162 and conditioned to a desired state. It is then supplied through a branch pipe and the valve 160 to a developer delivery nozzle N1 which also delivers the developer onto a wafer. In the development processor, the valve 160 is closed by a control signal from the controller 138 after a specified quantity of developer is applied onto the wafer and rotation of a spin chuck 134 is stopped. |
