| 摘要 |
PROBLEM TO BE SOLVED: To obtain a tungsten or molybdenum target having the fine structure of a specified value or below in average grain size and moreover having the relative density of a specified value or above by applying hot plastic working after obtaining a preliminarily sintered body consisting of W or Mo. SOLUTION: The target, having the fine structure of 10μm or below in average grain size and having the relative density of 99% or above, is obtained. Since high purity is required for the target in material powder of W or Mo, the purity of 99% or above is especially preferable. Also, the grain size of powder is preferably 10μm or below in Fisher grain size. A preliminarily sintered body is manufactured using above powder. HIP or hot press is preferable as the sintering method. In the case of applying HIP, powder is charged into an enclosing can for compacting and heated under vacuum, and a gas and water adsorbed to powder are removed. After finishing this operation, the HIP can is vacuum deaerated and sealed and used in HIP, and the preliminarily sintered body is obtained. Hot plastic working is applied to the body.
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