| 申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
TAKEMURA, KATSUYA, JOETSU-SHI, NIIGATA-KEN, JP;ISHIHARA, TOSHINOBU, JOETSU-SHI, NIIGATA-KEN, JP;MARUYAMA, KAZUMASA, JOETSU-SHI, NIIGATA-KEN, JP;TAKEDA, YOSHIHUMI, KUBIKI-MURA, KUBIKI-GUN, NIIGATA-KEN, JP;SHIGEMITSU, MINORU, KASHIMA-GUN, IBARAKI-KEN, JP;ITOH, KEN'ICHI, INAGE-KU, CHIBA-SHI, CHIBA-KEN, JP |
