发明名称 FORMATION OF COATING ON ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To obtain a coating contg. an opaque material or a shielding material. SOLUTION: This method for forming a coating on an electronic device comprises the steps of: applying a coating compsn., comprising phosphoric anhydride and a preceramic silicon-contg. material selected from among (i) a silsesquioxane hydrogen resin, (ii) a hydrolyzed or partially hydrolyzed compd. represented by the formula Rn Si(OR)4-n (wherein Rs each independently represents a 1-20 C aliph. substituent group, a 3-20C alicyclic substituent group, or a 6-20C arom. substituent group; and (n) is an integer of 0 to 3), (iii) a hydridopolysilazane resin, (iv) methylpolydisilylazane, and (v) boron-modified hydropolysilazane, on the surface of an electronic device; and converting the coating compsn. to a ceramic SiO2 -contg. coating.
申请公布号 JPH10183063(A) 申请公布日期 1998.07.07
申请号 JP19970272683 申请日期 1997.10.06
申请人 DOW CORNING CORP 发明人 CAMILLETTI ROBERT CHARLES;HALUSKA LOREN ANDREW;MICHAEL KEITH WINTON
分类号 B05D7/00;B05D7/24;C04B41/50;C04B41/52;C04B41/87;C04B41/89;C09D183/05;C09D183/16;C23C26/00;H01L21/314;H01L21/316;H01L21/318;H01L23/29;H01L23/31;H01L23/58;(IPC1-7):C09D183/05 主分类号 B05D7/00
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