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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要
申请公布号
JPH10173169(A)
申请公布日期
1998.06.26
申请号
JP19960335709
申请日期
1996.12.16
申请人
TOSHIBA CORP
发明人
NAKAJIMA KAZUAKI
分类号
H01L29/78;H01L21/28;H01L21/336;H01L21/8242;H01L29/49;(IPC1-7):H01L29/78
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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