| 摘要 |
A silicon chip (10) is micromachined so that a plurality of times (18) extend radially and coplanarly from an outer peripheral surface (22) of a circular base (14). First and second mounting members (28,36) extend from the base for mounting the base (14) to a support (32). The fist mounting member is disposed generally perpendicularly to the second mounting member. A pulse generator (74) applies electrostatic or electromagnetic pulses to successive free ends of the plurality of times so that each time momentarily vibrates in the plane in rotational sequence along the circumference of the base. The successive vibrators establish a net angular momentum approximating spinning wheel so tbat rotation of the sensor about the axis of one of the first or second mounting members causes the other mounting member to experience to deformation due to coriolis force. A plurality of strain gages (RX1-RX8, RY1-RY8) interconnected to form Wheatstone bridges (40,44,48,52) are disposed on the first and second mounting members for respectively sensing deformation of the first and second mounting members.
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