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发明名称
LOW MASS SUSCEPTOR
摘要
申请公布号
EP0846335(A1)
申请公布日期
1998.06.10
申请号
EP19960930571
申请日期
1996.08.22
申请人
ADVANCED SEMICONDUCTOR MATERIALS AMERICA, INC.
发明人
FOSTER, DERRICK, W.;VAN DER JEUGD, CORNELIUS, A.;WENGERT, JOHN, F.
分类号
H01L21/205;C23C16/458;H01L21/26;H01L21/687;(IPC1-7):H01L21/00;C23C16/44
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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