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发明名称
VORRICHTUNG UND VERFAHREN ZUR PLASMAERZEUGUNG DURCH VERWENDUNG VON MIKROWELLEN
摘要
申请公布号
DE69409963(D1)
申请公布日期
1998.06.04
申请号
DE19946009963
申请日期
1994.10.04
申请人
PLASMION, ORSAY, FR
发明人
WARTSKI, LOUIS, F-92120 MONTROUGE, FR;AUBERT, JEAN, F-78470 SAINT-REMY-LES-CHEVREUSE, FR
分类号
H01J37/32;H05H1/46;(IPC1-7):H05H1/46
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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