发明名称 |
A millimeter waveguide and a circuit apparatus using the same |
摘要 |
<p>A millimeter waveguide is disclosed which includes: a first single crystal substrate having a groove therein; a conductor film on a surface of said groove and a surface of said first single crystal substrate connected to said surface of said groove; a second single crystal substrate covering said conductor film; and a microstrip line on a surface of said second single crystal substrate, exposed to a cavity in said groove. A protruding portion may be formed on a bottom surface of the groove. The microstrip line including foundation (nickel chromium) and conductive (gold) layers may be formed on a surface of the groove. A protruding portion may be formed on the second single crystal substrate, wherein the height of this protruding portion is less than the depth of the groove. A millimeter waveguide for a resonator is also disclosed wherein a cavity is formed in substrates with grounding conductive layers on surfaces of the cavity, a probe extending from a microstrip line on a top surface of the substrates. Similar millimeter waveguide is also disclosed wherein the probe is replaced by magnetic field coupling structure. A circuit apparatus is also disclosed which comprises the millimeter waveguide apparatus mentioned above mentioned and an active circuit fixed on the millimeter waveguide apparatus. <IMAGE> <IMAGE></p> |
申请公布号 |
EP0845831(A2) |
申请公布日期 |
1998.06.03 |
申请号 |
EP19970120769 |
申请日期 |
1997.11.26 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
TAKAHASHI, KAZUAKI;MAKIMOTO, MITSUO |
分类号 |
H01L21/302;B81B1/00;H01L21/3065;H01P3/08;H01P5/08;(IPC1-7):H01P3/08 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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