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发明名称
ION SOURCE DEVICE
摘要
申请公布号
JPH10149789(A)
申请公布日期
1998.06.02
申请号
JP19960323625
申请日期
1996.11.18
申请人
NISSIN ELECTRIC CO LTD
发明人
MIKAMI TAKASHI;OGATA KIYOSHI
分类号
H01J27/02;H01J37/08;(IPC1-7):H01J37/08
主分类号
H01J27/02
代理机构
代理人
主权项
地址
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