INSTRUMENT AND METHOD FOR MEASURING LAMELLAR FINE STRUCTURE BY USING LOW INTERFERENCE OPTICAL INTERFEROMETRY

摘要

The end of a probe (5) through which a low coherence light is applied to a sample (S) is composed of an optical fiber (3) which does not have a coating 3Y and has a 3X-shaped coated fiber to improve the degree of contact between the probe (5) and the sample (S). A sample table (41) which can be moved in a z-axis direction is provided to a measurement instrument (1) and the probe (5) is attached to an arm (42) which can be moved in x-axis, y-axis and z-axis directions. It is preferable to attach an image pickup device (20) which picks up a magnified image of the part to be measured integrally with the probe (5). With the measurement instrument (1), observation data of OCM measurement can be accurately obtained even from a sample such as a skin which has an uneven and unsmooth surface. Further, the following of change with time and three-dimensional analysis of a lamellar fine structure of the sample can be performed.