| 摘要 |
PROBLEM TO BE SOLVED: To install a plurality of treating sections to a small space, by arrang ing the treating sections in two stages in the vertical direction and successively transporting objects to be treated to the treating sections. SOLUTION: First to fifth treating units 1a-1e are provided in such a state that the first to third units 1a-1c and fourth and fifth units 1d and 1e are arranged in two parallel rows. In the first unit 1a, a loader section 4 is mounted on a frame 3 and glass substrates 5 for liquid crystal carried out of the loader section 4 are supplied to the second unit 1b by means of a first delivering mechanism 6. In the second unit 1b, a brush cleaning unit 20 is positioned and the glass substrates 5 are continuously supplied to the unit 20. In addition, a second delivering mechanism 31 which has nearly the same constitution as the first mechanism 6 receives the glass substrate 5 and transports the substrates 5 to the fourth and fifth units 1d and 1e for treatment by lowering a mobile roller unit 33. |
