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发明名称
METHODS AND ARRANGEMENTS FOR IN-SITU PROCESS MONITORING AND CONTROL FOR PLASMA PROCESSING TOOLS
摘要
申请公布号
KR20120037420(A)
申请公布日期
2012.04.19
申请号
KR20117031574
申请日期
2010.06.29
申请人
LAM RESEARCH CORPORATION
发明人
VENUGOPAL VIJAYAKUMAR C.;BENJAMIN NEIL MARTIN PAUL
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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