Verfahren zur Herstellung eines halbleitenden kristallinen Filmes,申请号DE19906031880T-传众专利搜索

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发明名称	Verfahren zur Herstellung eines halbleitenden kristallinen Filmes
摘要
申请公布号	DE69031880(T2)	申请公布日期	1998.05.20
申请号	DE19906031880T	申请日期	1990.03.30
申请人	CANON K.K., TOKIO/TOKYO, JP	发明人	SATO, NOBUHIKO, ATSUGI-SHI, KANAGAWA-KEN, JP;YONEHARA, TAKAO, ATSUGI-SHI, KANAGAWA-KEN, JP;KUMOMI, HIDEYA, TOKYO, JP
分类号	H01L21/20;(IPC1-7):H01L21/20;C30B1/02	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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