METHOD FOR MINIMIZING PINK RING IN BLIND LASER VIAS
摘要
A method of forming a via in a laminated substrate by forming a copper oxide layer on a copper layer of the substrate by immersing the substrate in a copper oxide bath solution for between 30 seconds to 5 minutes. A dielectric layer is formed on the copper oxide layer. The via is laser drilled in substrate. The photo-absorptive layer and the ablated redeposited material on the photo-absorptive layer is then removed.
申请公布号
WO9820529(A1)
申请公布日期
1998.05.14
申请号
WO1997US18972
申请日期
1997.10.22
申请人
W.L. GORE & ASSOCIATES, INC.
发明人
GORRELL, ROBIN, E.;HUTCHINS, DONALD, G.;LEAF, MICHAEL, R.;NODDIN, DAVID, B.