发明名称 METHOD FOR MINIMIZING PINK RING IN BLIND LASER VIAS
摘要 A method of forming a via in a laminated substrate by forming a copper oxide layer on a copper layer of the substrate by immersing the substrate in a copper oxide bath solution for between 30 seconds to 5 minutes. A dielectric layer is formed on the copper oxide layer. The via is laser drilled in substrate. The photo-absorptive layer and the ablated redeposited material on the photo-absorptive layer is then removed.
申请公布号 WO9820529(A1) 申请公布日期 1998.05.14
申请号 WO1997US18972 申请日期 1997.10.22
申请人 W.L. GORE & ASSOCIATES, INC. 发明人 GORRELL, ROBIN, E.;HUTCHINS, DONALD, G.;LEAF, MICHAEL, R.;NODDIN, DAVID, B.
分类号 H01L21/48;H05K3/00;H05K3/38;H05K3/46;(IPC1-7):H01L21/48;H05K3/40 主分类号 H01L21/48
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