A micromechanical relay production process involves: (a) applying a sacrificial layer (26) onto a substrate (10) containing or bearing a stationary electrode (18); (b) applying and structuring a conductive layer (32) for defining a beam structure as a mobile counter-electrode (39) and applying a contact region (40) such that the conductive layer (32) extends between an anchoring region and the contact region (40) and is insulated from the contact region (40); and (c) etching away the sacrificial layer (26) to produce the beam structure with a mobile region and a region fixed to the substrate (10) by the anchoring region.
申请公布号
DE19646667(A1)
申请公布日期
1998.05.14
申请号
DE19961046667
申请日期
1996.11.12
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80636 MUENCHEN, DE
发明人
SCHIELE, IGNAZ, 80637 MUENCHEN, DE;KOZLOWSKI, FRANK, 82284 GRAFRATH, DE