| 摘要 |
PROBLEM TO BE SOLVED: To prevent residual from being generated in the formation of a bulkhead by forming a bulkhead material layer on an insulating substrate by using a conductive paste layer and almost uniformly dispersing electric charge generated as a result of collision charge by conductivity of the paste layer in a sandblast process forming the bulkhead. SOLUTION: An address electrode 7 is formed on a glass substrate 6 and dielectric layers 10 of low melting point glass are formed on the glass substrate 6 and the address electrode 7. Further, a bulkhead material layer 80 with conductivity to which polyaniline is added is formed and a mask film 11 is formed on the bulkhead material layer 80 by a photosensitive film. Next, the bulkhead 80 is converted into an insulating material by performing a burning after the bulkhead 80 is formed by performing a patterning for the bulkhead material layer 80 by a sandblast method by using the mask film 11 as a mask. Because the bulkhead material layer 80 has conductivity in the patterning process, electric charge is almost uniformly dispersed even if collision charge is generated and an etching rate difference is eliminated.
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