发明名称 COMPOSITE SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND PROCESS FOR PROD UCTION OF SAME
摘要 PURPOSE:To form the base region of a horizontal transistor by diffusion and the base region of a vertical transistor by uniform vapor growth method, thereby obtaining a composite semiconductor IC device wherein the hFE, fT of these transistors are improved.
申请公布号 JPS5243384(A) 申请公布日期 1977.04.05
申请号 JP19750117735 申请日期 1975.10.01
申请人 HITACHI LTD 发明人 IWAMATSU SEIICHI;HORIE NOBORU
分类号 H01L27/082;H01L21/331;H01L21/8226;H01L27/02;H01L29/73 主分类号 H01L27/082
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